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Measurement Parameters
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Measurement Range
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Repeatability
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Reproducibility
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Radius of curvature(mm)
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3~∞
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±0.01
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±0.02
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Fiber height(nm)
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-2000~+2000
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±1.0
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±2.0
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Vertex Offset(μm)
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0~500
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±0.5
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±1.5
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APC Perspective(°)
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0~12
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±0.01
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±0.02
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Key error(°)
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±1
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±0.01
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±0.02
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